UV and VUV Excilamps

The book provides a review of research, development, and application of modern gas discharge sources of spontaneous radiation ¿ excimer and exciplex lamps (excilamps). The physical processes associated with excimer and exciplex radiation and the techniques used for excilamp excitation are described. The book will be of interest to scientists and engineers involved with ultraviolet and vacuum ultraviolet sources and to students and lecturers of universities.