Soft X-rays And Extreme Ultraviolet Radiation
Principles And Applications
- Editore:
Cambridge University Press
- EAN:
9780521029971
- ISBN:
052102997X
- Pagine:
- 504
- Formato:
- Paperback
- Lingua:
- Inglese
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Descrizione Soft X-rays And Extreme Ultraviolet Radiation
This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.
Fuori catalogo - Non ordinabile
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