Semiconductor Silicon

The semiconductor material silicon is of paramount importance in microelectronics. The main purpose of this book is to give an up-to-date account of silicon materials science and technology. Particular emphasis has been put on new developments for future generations of microelectronics. The most recent advances in the field are covered by an international group of scientists, each an acknowledged expert in the subject under review. The level of treatment makes the book suitable both for graduate students and for those engaged in more advanced research.