MEMS and NEMS

MEMS and NEMS present the subject with the aim of providing precise information about micro sensors, actuators, transduction platforms and also provide the information about integration of Nanoelectromechanical systems and their fabrication process. This book is primarily intended to be a textbook for Bachelor degree students in Engineering, Science and Technology. This book has crucial role to play in the curriculum of all branches of science and technology. Efforts have been made to cover the various principles, working and apllications of MEMS & NEMS