Integrated micromechanical gyroscope-accelerometer

Principles of creation of LL-type micromechanical gyroscopes and L-type accelerometers are considered. Methods of creation of multiaxial micromechanical LL-type gyroscope-accelerometers are offered, a motion equation of their sensitive elements and model of elastic suspension rigidities of micromechanical devices are provided. The research was financially supported by the "Development Program of the Southern Federal University until 2021" (Project VnGr-07 / 2017-10).