Extreme Ultraviolet Lithography di Harry J. Levinson edito da SPIE Press

Extreme Ultraviolet Lithography

Editore:

SPIE Press

EAN:

9781510639393

ISBN:

151063939X

Pagine:
245
Formato:
Paperback
Lingua:
Inglese
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Descrizione Extreme Ultraviolet Lithography

Covers the many aspects of lithographic technology that needed to be addressed in order to make EUV lithography ready for high-volume manufacturing: exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Each topic is approached from the perspective of a practicing lithographer.

Fuori catalogo - Non ordinabile
€ 61.50

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