Crystal Growth and Evaluation of Silicon for VLSI and ULSI di Golla (Central Electronics Engineering Research Institute (CEERI) Eranna edito da Taylor & Francis Ltd
Alta reperibilità

Crystal Growth and Evaluation of Silicon for VLSI and ULSI

EAN:

9781138034198

ISBN:

1138034193

Pagine:
430
Formato:
Paperback
Lingua:
Inglese
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Descrizione Crystal Growth and Evaluation of Silicon for VLSI and ULSI

This is one of the first books to cover the systematic growth of silicon single crystals and the complete evaluation of silicon wafers, from sand to useful wafers for device fabrication. Written for engineers and researchers in semiconductor fabrication industries, this essential reference describes techniques used to grow silicon single crystals, reviews methods to evaluate silicon wafers to determine suitability, examines the effect of intentional and unintentional impurities, explores defects found in regular silicon-crystal lattice, and discusses silicon wafer preparation for VLSI and ULSI processing.

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