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Multiphysic modeling of a MEMS gyroscope with quadrature error compensation architecture

Multiphysic modeling of a MEMS gyroscope with quadrature error compensation architecture

di Davide Marano


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  • Tipologia: Tesi di Laurea di secondo livello / magistrale
  • Anno accademico: 2015/2016
  • Relatore: Gabriele Fichera
  • Relatore: Gabriele Fichera
  • Università: Università degli Studi di Catania
  • Facoltà: Ingegneria
  • Corso: Ingegneria Meccanica
  • Cattedra: Modellistica dei sistemi meccanici
  • Lingua: Inglese
  • Formato: PDF
  • Protezione: Adobe DRM (richiede software gratuito Adobe Digital Edition)
The present work is focused on the theoretical and experimental analysis of a three-axes mems gyroscope, implementing an innovative feedforward pi quadrature compensation architecture. The gyroscopes structure is explained and equations of motion are written; modal shapes and frequencies are obtained by finite element simulations. Electrostatic quadrature compensation strategy is explained focusing on the design of quadrature cancellationelectrodes. A new quadrature compensation strategy based on feedforward pi architecture is introduced in this device to take into account variations of device parameters during lifetime. Obtained results show a significant reduction of the quadrature error resulting in a improved performance of the device. Fabrication andtest results conclude the work.