Multiphysic modeling of a MEMS gyroscope with quadrature error compensation architecture

The present work is focused on the theoretical and experimental analysis of a three-axes mems gyroscope, implementing an innovative feedforward pi quadrature compensation architecture. The gyroscopes structure is explained and equations of motion are written; modal shapes and frequencies are obtained by finite element simulations. Electrostatic quadrature compensation strategy is explained focusing on the design of quadrature cancellationelectrodes. A new quadrature compensation strategy based on feedforward pi architecture is introduced in this device to take into account variations of device parameters during lifetime. Obtained results show a significant reduction of the quadrature error resulting in a improved performance of the device. Fabrication andtest results conclude the work.