Multiphysic modeling of a MEMS gyroscope with quadrature error compensation architecture
- Tipologia:
Tesi di Laurea di secondo livello / magistrale
- Anno accademico:
2015/2016
- Relatore:
- Gabriele Fichera
- Università:
Università degli Studi di Catania
- Facoltà:
Ingegneria
- Corso:
Ingegneria Meccanica
- Cattedra:
Modellistica dei sistemi meccanici
- Lingua:
- Inglese
- Pagine:
- 189
- Formato:
- Protezione:
- DRM Adobe
- Dimensione:
- 6.73 Mb
Descrizione Multiphysic modeling of a MEMS gyroscope with quadrature error compensation architecture
The present work is focused on the theoretical and experimental analysis of a three-axes mems gyroscope, implementing an innovative feedforward pi quadrature compensation architecture. The gyroscopes structure is explained and equations of motion are written; modal shapes and frequencies are obtained by finite element simulations. Electrostatic quadrature compensation strategy is explained focusing on the design of quadrature cancellationelectrodes. A new quadrature compensation strategy based on feedforward pi architecture is introduced in this device to take into account variations of device parameters during lifetime. Obtained results show a significant reduction of the quadrature error resulting in a improved performance of the device. Fabrication andtest results conclude the work.